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Hamed Sadeghian

Hamed Sadeghian

Netherlands Organisation for Applied Scientific Research, TNO, Netherlands

Title: Probing the nano-scale with the use of Nano-Opto-Mechatronics Instruments (NOMI)

Biography

Biography: Hamed Sadeghian

Abstract

Understanding the interactions of matter at nano-scale has become the key for the success of several applications. In nanoelectronics or semiconductor industry, it helps for better manufacturing (higher resolution towards sub-10 nm  structures, more complex structures) and reliable nanometrology and nano-inspection (for improving the yield of process). One of the NOMI to probe the interactions at nano-scale is scanning probe microscope. The ability to accurately measure critical dimensions in nanometer scale, has made it an important instrument in several industrial applications such as semiconductor, solar and data storage. Single SPM has never been able to compete with other inspection systems in throughput, thus has not fulfilled the industry needs in throughput and cost. Further increase of the speed of the single SPM helps, but it still is far from the required throughput and, therefore, insufficient for high-volume manufacturing.
 
The first part of my talk presents the development of a concept for a multiple miniaturized SPM (MSPM) heads system (parallel SPM), which can inspect and measure many sites in parallel. The very high speed of miniaturized SPM heads allow the user to scan many area, each with the size of tens of microemeters, in few seconds. 
Various nanoimaging such as subsurface probe microscopy will also be presented.
 
The second part of my talk is about meta-instrument. Metainstrument is a type of optical nanoinstrument where the core is based on optical metamaterials to go beyond the diffraction limits for high resolution imaging. Advantages of optical techniques compared to SPM is that they provide direct capture imaging which is fast and allow large fields of views to be covered quickly. The development of first generation of metainstrument will be discussed in detail.
 

Speaker Presentations

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Understanding the interactions of matter at nano-scale has become the key for the success of several applications. In nanoelectronics or semiconductor industry, it helps for better manufacturing (higher resolution towards sub-10 nm structures, more complex structures) and reliable nanometrology and nano-inspection (for improving the yield of process). One of the NOMI to probe the interactions at nano-scale is scanning probe microscope. The ability to accurately measure critical dimensions in nanometer scale, has made it an important instrument in several industrial applications such as semiconductor, solar and data storage. Single SPM has never been able to compete with other inspection systems in throughput, thus has not fulfilled the industry needs in throughput and cost. Further increase of the speed of the single SPM helps, but it still is far from the required throughput and, therefore, insufficient for high-volume manufacturing. The first part of my talk presents the development of a concept for a multiple miniaturized SPM (MSPM) heads system (parallel SPM), which can inspect and measure many sites in parallel. The very high speed of miniaturized SPM heads allow the user to scan many area, each with the size of tens of microemeters, in few seconds. Various nanoimaging such as subsurface probe microscopy will also be presented. The second part of my talk is about meta-instrument. Metainstrument is a type of optical nanoinstrument where the core is based on optical metamaterials to go beyond the diffraction limits for high resolution imaging. Advantages of optical techniques compared to SPM is that they provide direct capture imaging which is fast and allow large fields of views to be covered quickly. The development of first generation of metainstrument will be discussed in detail.