Meet Inspiring Speakers and Experts at our 3000+ Global Conference Series Events with over 1000+ Conferences, 1000+ Symposiums
and 1000+ Workshops on Medical, Pharma, Engineering, Science, Technology and Business.

Explore and learn more about Conference Series : World's leading Event Organizer

Back

Hamed Sadeghian


Hamed Sadeghian

Netherlands Organisation for Applied Scientific Research, TNO, Netherlands

Biography

Dr. Hamed Sadeghian received his PhD (Cum Laude) in 2010 from Delft University of Technology. He continued his career as a research associate and developed several nano-opto-mechanical instruments for nano-scale interaction measurement.  He is currently a Principal Scientist at TNO. His research program NOMI focuses on development of instruments based on the interaction of electromagnetic or mechanical/quantum waves with matter, with a focus on industrial and societal applications. Examples are the parallel AFM as a sub-nm, high throughput metrology and inspection solution for Semiconductor industry and the high resolution optical microscopy with metainstrument and 3D nanotomography to resolve invisible nanostructures below the surface. He is the scientific leader of the TNO Early Research Program 3D nanomanufacturing.  In the last 5 years, Hamed has participated in several EU-funded projects such as E450EDL, E450LMDAP, SeNaTe, Value4Nano, 3DAM and TakeMi5. In 2014 he received his MBA degree from Leuven Vlerick Business School, Belgium. He was also a co-founder of Jahesh Poulad Co. (2002), which designs, manufactures and installs mechanical and electrical equipment for steel industries. Hamed holds 40 patents, and has (co-) authored more than 60 technical papers and a book. He is a member of the editorial advisory board of Sensors & Transducers Journal and  a member of the technical committee of SENSORDEVICES conference. In 2012 he received the “TNO excellent researcher” award.

Abstract

Abstract : Probing the nano-scale with the use of Nano-Opto-Mechatronics Instruments (NOMI)

Speaker Presentations

Speaker PPTs Click Here

Understanding the interactions of matter at nano-scale has become the key for the success of several applications. In nanoelectronics or semiconductor industry, it helps for better manufacturing (higher resolution towards sub-10 nm structures, more complex structures) and reliable nanometrology and nano-inspection (for improving the yield of process). One of the NOMI to probe the interactions at nano-scale is scanning probe microscope. The ability to accurately measure critical dimensions in nanometer scale, has made it an important instrument in several industrial applications such as semiconductor, solar and data storage. Single SPM has never been able to compete with other inspection systems in throughput, thus has not fulfilled the industry needs in throughput and cost. Further increase of the speed of the single SPM helps, but it still is far from the required throughput and, therefore, insufficient for high-volume manufacturing. The first part of my talk presents the development of a concept for a multiple miniaturized SPM (MSPM) heads system (parallel SPM), which can inspect and measure many sites in parallel. The very high speed of miniaturized SPM heads allow the user to scan many area, each with the size of tens of microemeters, in few seconds. Various nanoimaging such as subsurface probe microscopy will also be presented. The second part of my talk is about meta-instrument. Metainstrument is a type of optical nanoinstrument where the core is based on optical metamaterials to go beyond the diffraction limits for high resolution imaging. Advantages of optical techniques compared to SPM is that they provide direct capture imaging which is fast and allow large fields of views to be covered quickly. The development of first generation of metainstrument will be discussed in detail.